Agnitron Technology

04/19/2024

Agnitron to attend the upcoming 21st International Conference on Metal Organic V***r Phase Epitaxy (ICMOVPE XXI) delivering four presentations.
The 21st International Conference on Metal Organic V***r Phase Epitaxy (ICMOVPE XXI) is scheduled for May 12-17, 2024 in Las Vegas, Nevada. Agnitron will be represented by Dr. Andrei Osinsky and Mr. William Brand, presenting two papers and two posters.

The first two topics to be presented by Agnitron will be on nitride materials systems and will be delivered by Dr. Andrei Osinsky, the president and CEO at Agnitron Technology. The first paper, titled “MOCVD Growth of Epitaxial Ferroelectric ScAlN and Related Alloys,” will discuss the use of specialized MOCVD reactor to grow ferroelectric nitrides such as ScAlN and YAlN. The growth of these materials using the commercial MOCVD poses challenges due to the absence of Sc/Y metal-organic precursors with high v***r pressure. The presentation highlights the need for specialized high-temperature precursor delivery modules and the impact of process conditions on efficiently incorporating Sc or Y into the lattice of AlN. Additionally, Dr. Osinsky will discuss the characteristics of HEMTs and ferroelectric devices based on MOCVD-grown ScAlN.

Dr. Osinsky’s second topic is “Large Area III-Nitride Device Structures on h-BN—Growth, Exfoliation and Transfer to Different Substrates.” The presentation will cover recent advancements in the MOCVD growth of two-dimensional h-BN films on wafers as large as 100 mm and the growth of GaN and AlGaN/GaN HEMTs on top of them. It will also include a discussion of transferring these materials onto alternative substrates.

The other two topics will be based on the MOCVD of β-Ga2O3 and will be presented by Mr. William Brand, a process engineer at Agnitorn Technology. The first topic Mr. Brand will present is “Recent Advances in Uniform Growth and Doping of β-Ga2O3 Using MOVPE.” This work will discuss recent advancements in Ga­2O3 growth, employing a patented, innovative close-injection showerhead (CIS) design. This work highlights the growth of high-quality β-Ga2O3 thin films at a growth rate of up to 20 µm/hr while maintaining excellent thickness and doping uniformities, critical for the growth of thick vertical devices and scaling up the process to large substrates.

Mr. Brand’s second topic is on achieving compensative doping in Ga2O3 using nitrogen. The paper’s title is “Compensative Nitrogen Doping of β-Ga2O3 by MOVPE.” The presentation focuses on using various nitrogen sources for nitrogen doping in MOVPE of Ga2O3, which is crucial for various applications, including the efficient interface compensation needed to realize effective devices.

Agnitron Technology, Inc., is a compound semiconductor technology company that supports the needs of R&D and production users related to MOCVD equipment. We strive to deliver products and services that enable the development of advanced semiconductor materials, device technologies, and products that improve quality of life and the environment.

For more information about Agnitron Technology and its groundbreaking work in the compound semiconductor industry, please visit the company’s website at www.agnitron.com.

https://agnitron.com/agnitron-to-attend-the-upcoming-21st-international-conference-on-metal-organic-v***r-phase-epitaxy-icmovpe-xxi-delivering-four-presentations/

04/19/2024

Agnitron Scientists to present at the WOCSEMMAD 2024 in Las Vegas, NV

Agnitron Technology is a key sponsor for the upcoming Workshop on Compound Semiconductor Materials and Devices (WOCSEMMAD) to be held in Las Vegas, NV Feb21-23, 2024, and will have two presentations to the technical community attending.

Both presentations will be given by Dr. Fikadu Alema, Agnitron’s Principal Staff Scientist and R&D Manager at Agnitron’s headquarters in Chanhassen, MN.

Dr. Alema’s 1st talk is titled “Epitaxial Ferroelectric ScAlN and Related Alloys Grown by MOCVD”. His 2nd talk is titled “Achieving Device-Quality Ga2O3 at >20µm/hour by MOCVD.

The work to be discussed was achieved at Agnitron’s R&D laboratory at the company’s headquarters. Alema & his staff of scientists continue to make strides in wide bandgap, ultra-wide bandgap, and ferroelectric semiconductor materials on numerous tools in the laboratory.

For further details on Agnitron’s cutting-edge technologies and contributions to the semiconductor industry, please visit Agnitron’s website at www.agnitron.com or email us at [email protected].

https://agnitron.com/agnitron-scientists-to-present-at-the-wocsemmad-2024-in-las-vegas-nv/

04/19/2024

Agnitron ships another A300 Laser Diode tool to Fortune 200 company.

Agnitron Technology, Chanhassen, MN, is pleased to announce the shipment of another Agnitron A300 laser production tool last month to one of its largest customers. The customer is a Fortune 200 company based in the USA with production sites worldwide. They are a global leader in semiconductor and software solutions. Another tool is slated to be delivered in Q1-24.

The A300 is a workhorse for long-wavelength laser production to meet the ever-increasing demand for datacom laser products. The increase in streaming platforms and cloud-based data centers continues to drive the demand for these devices. This trend continues as fiberoptic interconnects rapidly replaces copper for increased speed, lower energy costs, and the reduced thermal footprint of such data centers.

Agnitron currently supports multiple tools at the customer’s factories based here and abroad using the RDR technology. The A300 represents a significant boost to their device output per annum. It will help them drive cost, efficiency, and long-term sustainability for their users and customers.

Agnitron is a pioneering provider of innovative semiconductor manufacturing equipment and technology solutions. With a focus on Metal Organic Chemical V***r Deposition (MOCVD) processes, metrology, and equipment, the company has seen an uptick in demand for its products. The Agnitron Imperium™ software control package, operating on more than 100 tools worldwide, has also seen a boost in recent months. Agnitron can take a tool, effectively obsoleted by the OEM, and upgrade the controls and software with a state-of-the-art control system to breathe years of new life into a tool.

Contact Agnitron www.agnitron.com or [email protected] with inquires on any of its innovative products.

https://agnitron.com/agnitron-ships-another-a300-laser-diode-tool-to-fortune-200-company/

07/10/2023

Agnitron to present multiple papers at GOX 2023, the 6th U.S. Gallium Oxide Workshop in Buffalo, N.Y., August 13-16, 2023.

Agnitron will present two papers at the GOX 2023 workshop next month. They will join at least 100 other researchers and scientists in Buffalo for this increasingly important gathering.

Ultra-wide bandgap semiconductors continue to make progress toward being a viable material for next generation RF and power devices. Agnitron Technology has been a key player in research and growth of these materials and the MOCVD equipment to grow them.

Dr. Fikadu Alema will present a paper entitled, “Controllable Deep Acceptor Doping in MOCVD β-Ga2O3 to Compensate Parasitic Interface Charges.” Dr. Alema is Agnitron’s chief scientist and has been working on these materials for ten years. His recent work investigates the quality of the substrate and the epitaxial interface. This will help foster the development of higher quality materials necessary for developing real-world devices made of Ga2O3. He grows and studies these materials everyday at Agnitron’s HQ Labs located in Chanhassen, MN.

Dr. Andrei Osinsky, Agnitron’s CEO will present an invited paper entitled “Advances in the MOCVD Growth of β-Ga2O3 and Related Heterostructures.” Dr. Osinsky is Agnitron’s founder and has been working on this material system for more than a dozen years. He will highlight the path to record breaking materials characteristics as well as world record device results produced from the materials grown at Agnitron’s HQ Labs.

The Workshop’s website can be found at this link ( https://gox2023.avs.org/ ) and as more groups work on this promising material system, this event will continue to expand. Join the workshop for an exciting event.

Agnitron Technology, Inc. is a compound semiconductor technology company and supports MOCVD equipment-related needs of R&D and production users. Agnitron’s Agilis Series MOCVD equipment offers configurations which support material growth capabilities for III-N, As/P, oxide, 2-D/TMD and many other related materials. The Agilis β-Ga2O3 configuration with single or multi-wafer loading capacity reactor options is now available for the general market. Agnitron also performs contract III-N and oxide R&D services at their MOCVD growth laboratory in Eden Prairie, MN. Visit Agnitron’s website at www.agnitron.com or contact [email protected] for more information about their products and services.

https://agnitron.com/agnitron-to-present-multiple-papers-at-gox-2023-the-6th-u-s-gallium-oxide-workshop-in-buffalo-n-y-august-13-16-2023/

06/09/2023

Agnitron Technology introduces the Blue & UV Fiberoptic Reflectometer for In-situ Monitoring

Agnitron Technology of Chanhassen, MN has begun providing its customers with an advanced Blue & UV reflectometer to provide growth rate (or etch rate) of Ga2O3 & GaN including its different alloys. Moreover it measures the thickness (or etch depth) of the epitaxial films. It spans a host of oxide materials, important in the research community more recently.

To drive maximum flexibility, the unit can be configured with several different wavelength LEDs. For Ga2O3 & GaN alloys either 405nm or 365nm is most common. Customers can select the wavelength of choice and switch between them at desired. In the next months, a 280nm LED will be tested to support customers growing other ultra-wide bandgap materials. In addition, the reflectometer is equipped with a powerful analytical software package based on the Imperium™ platform. It is synced with Imperium™ to provide a comprehensive display of the time cycles for correlation of the dynamic layers and the reflectometer outputs. The recipes, the growth, the reflectance output, and the analysis are all linked for the Agnitron customer. It is displayed in real-time, or the customer may analyze the data post-run. A simulation model to determine the growth rate and the film thickness is shown below within Imperium™.

Pictured below is the new reflectometer on Agnitron’s popular Agilis 100 MOCVD tool using the BLUE version seen at the center of the wafer positioned on susceptor. A corresponding display of the growth is also shown. The apparatus is easy to install, configure, change wavelengths, and calibrate. A signature feature of Agnitron’s products.

The device can be configured for a variety of OEM tools as well. Contact Agnitron Technology at [email protected] with any questions or further information requests.

Agnitron Technology, Inc. is a compound semiconductor technology company and supports MOCVD equipment related needs of R&D and production users. We strive to deliver products and services to enable development of advanced semiconductor material, device technologies, and products which improve quality of life and the environment.

Agnitron Technology of Chanhassen, MN has begun providing its customers with an advanced Blue & UV reflectometer to provide growth rate (or etch rate) of Ga2O3 & GaN including its different alloys. Moreover it measures the thickness (or etch depth) of the epitaxial films. It spans a host of oxide ma...

05/02/2023

Agnitron Technology to attend the International Conference on Compound Semiconductor Manufacturing Technology-CS Mantech.

Agnitron Technology scientists and engineers will attend the CS Mantech conference in Orlando, Florida May 15- May 18. The company will participate in the poster session scheduled for Thursday afternoon and will exhibit in the exhibitor’s hall Tuesday-Thursday.

Dr. Tim Vogt of Agnitron will present his recent work entitled “Manufacturable processes and performance characteristics for few-layer hexagonal boron nitride based templates on sapphire.” He’ll present the growth methods, characterization and equipment used to grow and characterize the material.

Agnitron has an extensive laboratory with multiple tools growing all manner of materials routinely. Likewise, we have an extensive array of characterization tools on-site. Additionally, we have a strong network of academic and commercial collaborators that we share technologies with as well characterize and evaluate materials together.

His work is the result of the Agnitron technical laboratory team’s efforts at Agnitron’s HQ in MN. Agnitron is continuously improving, updating, and deploying the latest technologies in the Chanhassen laboratory. Recent developments in the Agnitron hardware and software control systems have been crucial to the results of Dr. Vogt’s current work.

Agnitron Technology, Inc. is a compound semiconductor technology company and supports MOCVD equipment related needs of R&D and production users. We strive to deliver products and services to enable development of advanced semiconductor material, device technologies, and products which improve quality of life and the environment.

https://agnitron.com/agnitron-technology-to-attend-the-international-conference-on-compound-semiconductor-manufacturing-technology-cs-mantech/

04/27/2023

Agnitron featured on the cover of “Compound Semiconductor” magazine; feature article on, “Taking Ga2O3 to the next level.”

Agnitron Technology and Compound Semiconductor Magazine have shared several technical exchanges over the years. In years past, articles have featured the state-of-the-art material science work being done at Agnitron HQ. Its in-house laboratory and its unique technologies have been featured. This month that cooperation continues, however it includes two of Agnitron’s talented customers and collaborators. The University of California at Santa Barbara and Cornell University are both doing world class work with their Agnitron systems. The article highlights work they have accomplished with Agnitron Technology’s tools and their respective know-how. Agnitron’s headquarters, located in Chanhassen, MN, has an extensive laboratory with multiple tools supporting the work of its customers. In fact, it produces world-record Ga2O3 material. Agnitron’s CEO Andrei Osinsky comments, “We staff a world-class laboratory in order to help push the window of the technologies we provide to our equipment customers and collaborators”.

Agnitron Technology has provided cutting-edge semiconductor equipment and technology solutions now for > 15 years. It has focused on the advancement in the Gallium Oxide materials. The article while highlighting the company’s comprehensive range of equipment and solutions, also includes a glimpse of its most recent product, the new compact mini-Agilis 50HT™. A cost effective and versatile MOCVD reactor system for R&D groups. The first tool in this category has been produced to grow SiC at >1700°C.

Agnitron’s commitment to innovation and customer service has set the company apart in the industry. Agnitron is proud of the accomplishments outlined in the article and is excited to share its groundbreaking work with readers and industry experts. It appreciates the contribution of its customers to this publication.

To read this article and many other insightful articles regarding compound semiconductors go to the home page of Compound Semiconductor Magazine at https://compoundsemiconductor.net/home and read the most recent issue of the magazine.

For more information about Agnitron Technology and its groundbreaking work in the compound semiconductor industry, please visit the company’s website at www.agnitron.com.

Our selection of industry specific magazines cover a large range of topics.

04/13/2023

https://agnitron.com/agnitron-technology-builds-a-custom-sic-mocvd-tool-for-notre-dame-university/

Agnitron Technology Inc. is pleased to announce the introduction of the Agilis 50™. More exciting is the initial version is a custom Agnitron Agilis 50™-HT SiC tool for research and development. This will be going to Notre Dame University located in South Bend, Indiana. The demand for R&D of thi...

04/12/2023

https://agnitron.com/another-a300-laser-diode-tool-ships-from-agnitron/

Another A300 Laser Diode tool ships from Agnitron. Agnitron has shipped another newly built A300 tool to one of its flagship customers. This is a current customer who needed to expand their fleet of MOCVD tools. It will be deployed to drive product development and device

01/31/2023

The upcoming Workshop on Compound Semiconductor Materials and Devices to be held in San Antonio, TX will have two Agnitron scientists presenting papers to the technical community present at the conference. The 1st Agnitron scientist presenting at the workshop is Dr. Fikadu Alema. The title of the wo...

01/24/2023

Agnitron has announced the sale of an additional two Agilis™ 100 MOCVD tools to a prestigious university in the southwest of United States.

Agnitron has announced the sale of an additional two Agilis™ 100 MOCVD tools to a prestigious university in the southwest of United States. One will support the G2O3 process growths and related device development at the university. The wide bandgap materials grown on this system will bolster the w...

01/24/2023

Agnitron Technology Inc. is pleased to announce the sale of another Agnitron Agilis 100™ system to a prominent university located in the upper Midwest region of the United States.

Agilis 100™ AlN, AlGaN, Ga2O3 MOCVD System Agnitron Technology Inc. is pleased to announce the sale of another Agnitron Agilis 100™ system to a prominent university located in the upper Midwest region of the United States. The purchase of Agnitron's latest Agilis 100 Metal Organic Chemical V***r...